Semiconductor Industry
Toyo-G Precision Lubrication Solutions for the Semiconductor Industry
Maximize uptime and protect cleanroom integrity with Toyo-G specialized lubricants for semiconductor manufacturing. Low-outgassing greases, precision robot lubricants, and high-purity cleaners for wafer fabrication and assembly.
Lubricants Engineered for Your Application
The Critical Role of Lubrication in Semi-conductor Manufacturing
In semiconductor fabs and assembly plants, even microscopic contamination can destroy millions of dollars in wafers. Standard lubricants can migrate, outgas, or generate particles that compromise yield.
Toyo-G offers a targeted portfolio of low-volatility, high-purity lubricants and cleaners specifically selected for the unique demands of the semiconductor industry. From wafer handling robots to vacuum pumps and cleanroom conveyors, our solutions help you maintain stringent ISO Class cleanliness standards while extending equipment life.
Why Toyo-G for Your Semiconductor Facility?
- Cleanroom-Compatible Formulations: Selected to minimize outgassing and particle generation.
- Expertise in Precision: We understand the consequences of microscopic contamination.
- Competitive Lead Times: Local stock in
Malaysia for fast delivery. - Technical Support: We can help you select
the right product for your specific equipment
(OEM compatibility guidance available).
Our Semiconductor Product Line
For Wafer Handling & Process Robotics
Toyo-G EAJ Series – Robot Arm Grease
Application: SCARA robots, atmospheric robots, and EFEM (Equipment Front End Module) bearings.
Why it works: Formulated for extremely low particle generation and minimal oil separation (bleed).
Provides reliable lubrication for millions of cycles in cleanroom conditions.
Benefit: Reduces wafer defects caused by lubricant migration.
For Vacuum & Seals (Chambers, Gates, Loadlocks)
Toyo-G SO Series – Silicone Grease & Silicone Oil
Application: Vacuum chamber O-rings, gate valve seals, and loadlock mechanisms.
Why it works: Low outgassing characteristics (low VOCs) compatible with elastomers used in vacuum seals. Wide operating temperature range.
Benefit: Protects seal integrity and maintains vacuum levels without contaminating chamber internals.
For Precision Cleaning & Maintenance
Toyo-G TIC Series – Contact Cleaner & Degreaser
Application: Cleaning electronic connectors, sensors, printed circuit boards, and precision guide rails.
Why it works: Evaporates quickly, leaves no residue, and is safe for most plastics used in semiconductor equipment.
Benefit: Fast drying without disassembly (for many components), reduces cleaning time and chemical residue risk.
For Ancillary Equipment (Pumps, Motors, Conveyors)
Toyo-G EAJ Series – Polyurea & Lithium Complex Grease
Application: Electric motor bearings (for vacuum pumps, HVAC), cleanroom conveyor bearings.
Why it works: Long-life formulation reduces re-greasing frequency (less chance of contamination from maintenance). Good high-temperature stability.
Benefit: Lowers maintenance frequency and associated contamination risk in clean areas.
For Precision Cleaning & Maintenance
Chambers
Gates
Loadlocks
For Ancillary Equipment
Pumps
Motors
Conveyors
For Vacuum & Seals
Get a Recommendation
Not sure which lubricant is safe for your cleanroom? Tell us your equipment make/model or your seal material, and we will provide a data sheet and compatibility guide.
Contact our Semiconductor Lubrication Specialist | Download the Semiconductor Product Selector Guide (PDF)
